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Influence of Conditioning Temperature on Defects in the Double Al<sub>2</sub>O<sub>3</sub>/ZnO Layer Deposited by the ALD Method

by Katarzyna Gawlińska-Nęcek, Mateusz Wlazło, Robert Socha, Ireneusz Stefaniuk, Łukasz Major, Piotr Panek
Published 2021-02-01

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