Structural and Mechanical Properties of a-BCN Films Prepared by an Arc-Sputtering Hybrid Process

by Yuki Hirata, Ryotaro Takeuchi, Hiroyuki Taniguchi, Masao Kawagoe, Yoshinao Iwamoto, Mikito Yoshizato, Hiroki Akasaka, Naoto Ohtake
Published 2021-02-01