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Marsetio Noorprajuda
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Marsetio Noorprajuda
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Polarity inversion of AlN film grown on nitrided a-plane sapphire substrate with pulsed DC reactive sputtering
by
Marsetio
Noorprajuda
,
Makoto Ohtsuka
,
Hiroyuki Fukuyama
Published 2018-04-01
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