Mastering of NIL Stamps with Undercut T-Shaped Features from Single Layer to Multilayer Stamps

by Philipp Taus, Adrian Prinz, Heinz D. Wanzenboeck, Patrick Schuller, Anton Tsenov, Markus Schinnerl, Mostafa M. Shawrav, Michael Haslinger, Michael Muehlberger
Published 2021-04-01

Optimized plasma-assisted bi-layer photoresist fabrication protocol for high resolution microfabrication of thin-film metal electrodes on porous polymer membranes

by Patrick Schuller, Mario Rothbauer, Christoph Eilenberger, Sebastian R.A. Kratz, Gregor Höll, Philipp Taus, Markus Schinnerl, Jakob Genser, Peter Ertl, Heinz Wanzenboeck
Published 2019-01-01