Elastic modulus and coefficient of thermal expansion of piezoelectric Al1−xScxN (up to x = 0.41) thin films

by Yuan Lu, Markus Reusch, Nicolas Kurz, Anli Ding, Tim Christoph, Mario Prescher, Lutz Kirste, Oliver Ambacher, Agnė Žukauskaitė
Published 2018-07-01

Electrostatic Self-Assembly of Diamond Nanoparticles onto Al- and N-Polar Sputtered Aluminum Nitride Surfaces

by Taro Yoshikawa, Markus Reusch, Verena Zuerbig, Volker Cimalla, Kee-Han Lee, Magdalena Kurzyp, Jean-Charles Arnault, Christoph E. Nebel, Oliver Ambacher, Vadim Lebedev
Published 2016-11-01