Showing 1 - 3 results of 3 for search 'Marcel Tichem', query time: 0.11s Refine Results
  1. 1
    Post-Release Deformation and Motion Control of Photonic Waveguide Beams by Tuneable Electrothermal Actuators in Thick SiO2
    by Kai Wu, Marcel Tichem
    Published 2018-09-01
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    Article
  2. 2
    Electrothermal Actuators for SiO2 Photonic MEMS
    by Tjitte-Jelte Peters, Marcel Tichem
    Published 2016-11-01
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    Article
  3. 3
    Proportional Microvalve Using a Unimorph Piezoelectric Microactuator
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    Article
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