Study of Birefringence and Stress Distribution of SiO₂ Film Optical Waveguide on Silicon Wafer

by Qingyu Sun, DeGui Sun, Hongpeng Shang, Ting Yu, Liyuan Chang, Zheyu Sun, Wenchao Xing, Mingxue Dong
Published 2019-05-01

Investigation for the structural stress of SiO2 thin films and its distribution on the large-wafer created by plasma enhanced chemical vapor deposition

by DeGui Sun, Qingyu Sun, Wenchao Xing, Zheyu Sun, Hongpeng Shang, Liyuan Chang, Xueping Wang, Peng Liu, Trevor Hall
Published 2018-08-01