The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication

by Victor Deinhart, Lisa-Marie Kern, Jan N. Kirchhof, Sabrina Juergensen, Joris Sturm, Enno Krauss, Thorsten Feichtner, Sviatoslav Kovalchuk, Michael Schneider, Dieter Engel, Bastian Pfau, Bert Hecht, Kirill I. Bolotin, Stephanie Reich, Katja Höflich
Published 2021-04-01