An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer

by Xiaoxiao Song, Huafeng Liu, Yanyan Fang, Chun Zhao, Ziqiang Qu, Qiu Wang, Liang-Cheng Tu
Published 2020-06-01

A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process

by Kang Rao, Xiaoli Wei, Shaolin Zhang, Mengqi Zhang, Chenyuan Hu, Huafeng Liu, Liang-Cheng Tu
Published 2019-06-01

Novel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement Applications

by Zhu Li, Wen Jie Wu, Pan Pan Zheng, Jin Quan Liu, Ji Fan, Liang Cheng Tu
Published 2016-09-01