Low-Damage and Self-Limiting (Al)GaN Etching Process through Atomic Layer Etching using O₂ and BCl₃ Plasma

by Il-Hwan Hwang, Ho-Young Cha, Kwang-Seok Seo
Published 2021-02-01

SF6 plasma treatment for leakage current reduction of AlGaN/GaN heterojunction field-effect transistors

by Hyun-Seop Kim, Kwang-Seok Seo, Jungwoo Oh, Ho-Young Cha
Published 2018-09-01

Development of Catalytic-CVD SiN_x Passivation Process for AlGaN/GaN-on-Si HEMTs

by Myoung-Jin Kang, Hyun-Seop Kim, Ho-Young Cha, Kwang-Seok Seo
Published 2020-09-01

Crystalline AlN Interfacial Layer on GaN Using Plasma-Enhanced Atomic Layer Deposition

by Il-Hwan Hwang, Myoung-Jin Kang, Ho-Young Cha, Kwang-Seok Seo
Published 2021-04-01

Characterization of High-Performance InGaAs QW-MOSFETs With Reliable Bi-Layer HfO_xN_y Gate Stack

by Su-Keun Eom, Min-Woo Kong, Ho-Young Cha, Kwang-Seok Seo
Published 2019-01-01

Effects of Recessed-Gate Structure on AlGaN/GaN-on-SiC MIS-HEMTs with Thin AlO_xN_y MIS Gate

by Hyun-Seop Kim, Myoung-Jin Kang, Jeong Jin Kim, Kwang-Seok Seo, Ho-Young Cha
Published 2020-03-01