Qualitative Assessment of the UV Exposition Process Near the Diffraction Limits

by Agnieszka Zawadzka, Kornelia Indykiewicz, Regina Paszkiewicz
Published 2020-01-01

Substrate Effect in Electron Beam Lithography

by Kornelia Indykiewicz, Bogdan Paszkiewicz, Regina Paszkiewicz
Published 2018-01-01

The Validation of Various Technological Factors Impact on the Electron Beam Lithography Process

by Agnieszka Zawadzka, Kornelia Indykiewicz, Regina Paszkiewicz
Published 2021-01-01

Proximity Effect in Gate Fabrication Using Photolithography Technique

by Joanna Prazmowska, Kornelia Indykiewicz, Bogdan Paszkiewicz, Regina Paszkiewicz
Published 2017-01-01