TEM Observation of the Dislocations Nucleated from Cracks inside Lightly or Heavily Doped Czochralski Silicon Wafers

by Seiji Shiba, Koji Sueoka
Published 2011-01-01

First-Principles Calculation on Initial Stage of Oxidation of Si (110)-(1 × 1) Surface

by Takahiro Nagasawa, Koji Sueoka
Published 2011-01-01

Estimation of the temperature dependent interaction between uncharged point defects in Si

by Eiji Kamiyama, Jan Vanhellemont, Koji Sueoka
Published 2015-01-01

Systematic Investigation of Gettering Effects on 4th Row Element Impurities in Si by Dopant Atoms

by Koji Sueoka, Ken Kamimura, Seiji Shiba
Published 2009-01-01

Gettering Sinks for Metallic Impurities Formed by Carbon-Cluster Ion Implantation in Epitaxial Silicon Wafers for CMOS Image Sensor

by Ayumi Onaka-Masada, Ryosuke Okuyama, Satoshi Shigematsu, Hidehiko Okuda, Takeshi Kadono, Ryo Hirose, Yoshihiro Koga, Koji Sueoka, Kazunari Kurita
Published 2018-01-01