Etude des interactions plasma–surface pendant la gravure du silicium dans des plasmas HBr/Cl2/O2

by Kogelschatz, Martin
Published 2004

Growth and characterization of gold catalyzed SiGe nanowires and alternative metal-catalyzed Si nanowires

by Gentile Pascal, Oehler Fabrice, Kreisel Jens, Roussel Hervé, Montès Laurent, Potié Alexis, Baron Thierry, Dhalluin Florian, Rosaz Guillaume, Salem Bassem, Latu-Romain Laurence, Kogelschatz Martin
Published 2011-01-01