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Johnson, Joy Marie
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Johnson, Joy Marie
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Slurry abrasive particle agglomeration experimentation and modeling for chemical mechanical planarization (CMP)
by
Johnson
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Joy
Marie
Published 2015
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Modeling of advanced integrated circuit planarization processes : electrochemical-mechanical planarization (eCMP), STI CMP using non-conventional slurries
by
Johnson
,
Joy
Marie
Published 2010
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