High-Speed Focus Inspection System Using a Position-Sensitive Detector

by Binh Xuan Cao, Phuong Le Hoang, Sanghoon Ahn, Heeshin Kang, Jengo Kim, Jiwhan Noh
Published 2017-12-01

In-Situ Real-Time Focus Detection during Laser Processing Using Double-Hole Masks and Advanced Image Sensor Software

by Binh Xuan Cao, Phuong Le Hoang, Sanghoon Ahn, Jeng-o Kim, Heeshin Kang, Jiwhan Noh
Published 2017-07-01

Design and Performance of a Focus-Detection System for Use in Laser Micromachining

by Binh Xuan Cao, Munju Bae, Hyonkee Sohn, Jiyeon Choi, Youngduk Kim, Jeng-o Kim, Jiwhan Noh
Published 2016-01-01