Mechanisms of suppressing secondary nucleation for low-power and low-temperature microwave plasma self-bias-enhanced growth of diamond films in argon diluted methane

by Ji-heng Jiang, Yonhua Tzeng
Published 2011-12-01

Effects of gas residence time and plasma-substrate interactions on microwave plasma enhanced diamond growth in methane diluted by argon without hydrogen additive

by Ji-HengJiang, 姜吉亨
Published 2012