Enhanced Reliability of a-IGZO TFTs with a Reduced Feature Size and a Clean Etch-Stopper Layer Structure

by Jae-Moon Chung, Fang Wu, Seung-Woo Jeong, Ji-Hoon Kim, Yong Xiang
Published 2019-05-01

Enhancement of a-IGZO TFT Device Performance Using a Clean Interface Process via Etch-Stopper Nano-layers

by Jae-Moon Chung, Xiaokun Zhang, Fei Shang, Ji-Hoon Kim, Xiao-Lin Wang, Shuai Liu, Baoguo Yang, Yong Xiang
Published 2018-05-01