Optical emission spectroscopy based machine learning classifiers of AlN crystal properties deposited by pulsed direct current reactive magnetron sputtering

by Hsueh-Er Chang, 張學而
Published 2019

Correlation of Impedance Matching and Optical Emission Spectroscopy during Plasma-Enhanced Chemical Vapor Deposition of Nanocrystalline Silicon Thin Films

by Li-Han Kau, Hung-Jui Huang, Hsueh-Er Chang, Yu-Lin Hsieh, Chien-Chieh Lee, Yiin-Kuen Fuh, Tomi T. Li
Published 2019-05-01