Hierarchical Self-Assembly of Thickness-Modulated Block Copolymer Thin Films for Controlling Nanodomain Orientations inside Bare Silicon Trenches

by Jin Yong Shin, Young Taek Oh, Simon Kim, Hoe Yeon Lim, Bom Lee, Young Chun Ko, Shin Park, Seung Won Seon, Se Gi Lee, Seung Soo Mun, Bong Hoon Kim
Published 2021-02-01