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Gould, Parker Andrew
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Gould, Parker Andrew
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Design, fabrication, and characterization of an ultra-low cost inductively-coupled plasma chemical vapor deposition tool for micro- and nanofabrication
by
Gould
,
Parker
Andrew
.
Published 2019
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2
Design, fabrication, and characterization of a compact deep reactive ion etching system for MEMS processing
by
Gould
,
Parker
Andrew
,
Hsing, Mitchell David
Published 2015
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