Effect of Growth Temperature on the Structural and Electrical Properties of ZrO2 Films Fabricated by Atomic Layer Deposition Using a CpZr[N(CH3)2]3/C7H8 Cocktail Precursor

by Jong-Ki An, Nak-Kwan Chung, Jin-Tae Kim, Sung-Ho Hahm, Geunsu Lee, Sung Bo Lee, Taehoon Lee, In-Sung Park, Ju-Young Yun
Published 2018-03-01