Singularities of Polishing Substrates GaAs by Chemo-Dynamical and Non-Contact Chemo-Mechanical Methods

by G. A. Pashchenko, M. J. Kravetsky, O. V. Fomin
Published 2016-10-01

Features of electrochemical processes at the boundary p-GaAs–HF water solution

by G.A. Pashchenko, M.Yu. Kravetskyi, L.I. Trishchuk
Published 2018-10-01

Model of smoothing roughness on GaAs wafer surface by using nonabrasive chemical-and-mechanical polishing

by A.V. Fomin, G.A. Pashchenko, M.Yu. Kravetskyi, I.G. Lutsyshyn
Published 2017-04-01