Recrystallization of thick implanted GeSn layers with nanosecond laser annealing

by Acosta Alba, P., Bernier, N., Bertrand, M., Calvo, V., Casiez, L., Chelnokov, A., Chrétien, J., Frauenrath, M., Hartmann, J.M, Mazen, F., Pauc, N., Reboud, V., Richy, J., Rouchon, D.
Published 2022