Non-Contact Surface Roughness Measurement by Implementation of a Spatial Light Modulator

by Laura Aulbach, Félix Salazar Bloise, Min Lu, Alexander W. Koch
Published 2017-03-01

Extension and Limits of Depolarization-Fringe Contrast Roughness Method in Sub-Micron Domain

by Franziska Pöller, Félix Salazar Bloise, Martin Jakobi, Jie Dong, Alexander W. Koch
Published 2021-08-01

Non-Contact Roughness Measurement in Sub-Micron Range by Considering Depolarization Effects

by Franziska Pöller, Félix Salazar Bloise, Martin Jakobi, Shengjia Wang, Jie Dong, Alexander W. Koch
Published 2019-05-01