Heterogeneous Integration of Metal Oxides—Towards a CMOS Based Multi Gas Sensor Device

by Anton Köck, Marco Deluca, Florentyna Sosada-Ludwikowska, Günther Maier, Robert Wimmer Teubenbacher, Martin Sagmeister, Karl Rohracher, Ewald Wachmann, Jan Steffen Niehaus, Sören Becker, Öznur Tokmak, Hendrik Schlicke, Alexander Blümel, Karl Popovic, Martin Tscherner
Published 2019-06-01