Phase Formation and High-Temperature Stability of Very Thin Co-Sputtered Ti-Al and Multilayered Ti/Al Films on Thermally Oxidized Si Substrates

by Marietta Seifert, Eric Lattner, Siegfried B. Menzel, Steffen Oswald, Thomas Gemming
Published 2020-04-01

Study of TiAl thin films on piezoelectric CTGS substrates as an alternative metallization system for high-temperature SAW devices

by Marietta Seifert, Eric Lattner, Siegfried B. Menzel, Steffen Oswald, Thomas Gemming
Published 2021-05-01