Measurement of Ion Energy Distribution and Deposition of Ti Thin Films Using ABPPS Technology on Glass Substrate

by Dae-Chul Kim, Young-Woo Kim, Yong-Hyun Kim, Jong-Bae Park, Jong-Sik Kim, Duk-Sun Han
Published 2021-07-01

Ion and Radical Characteristics (Mass/Energy Distribution) of a Capacitively Coupled Plasma Source Using Plasma Process Gases (CxFy)

by Yong-Hyun Kim, Jong-Sik Kim, Dae-Chul Kim, Young-Woo Kim, Jong-Bae Park, Duk-Sun Han, Mi-Young Song
Published 2021-08-01