Influence of ion implantation on the charge storage mechanism of vanadium nitride pseudocapacitive thin films

by Etienne Le Calvez, Dmitri Yarekha, Laurent Fugère, Kévin Robert, Marielle Huvé, Maya Marinova, Olivier Crosnier, Christophe Lethien, Thierry Brousse
Published 2021-04-01

3D Patterning of Si by Contact Etching With Nanoporous Metals

by Stéphane Bastide, Encarnacion Torralba, Mathieu Halbwax, Sylvain Le Gall, Elias Mpogui, Christine Cachet-Vivier, Vincent Magnin, Joseph Harari, Dmitri Yarekha, Jean-Pierre Vilcot
Published 2019-04-01