Nanomechanical Characterization of Vertical Nanopillars Using an MEMS-SPM Nano-Bending Testing Platform

by Zhi Li, Sai Gao, Uwe Brand, Karla Hiller, Susann Hahn, Gerry Hamdana, Erwin Peiner, Helmut Wolff, Detlef Bergmann
Published 2019-10-01