A novel sacrificial-layer process based on anodic bonding and its application in an accelerometer

by Lingyun Wang, Yong He, Zhan Zhan, Lingke Yu, Huan Wang, Daner Chen
Published 2015-04-01

Research on Glass Frit Deposition Based on the Electrospray Process

by Yifang Liu, Daner Chen, Zhan Zhan, Chenlei Li, Jianyi Zheng, Daoheng Sun
Published 2016-04-01