ToF-SIMS 3D Analysis of Thin Films Deposited in High Aspect Ratio Structures via Atomic Layer Deposition and Chemical Vapor Deposition

by Alireza M. Kia, Nora Haufe, Sajjad Esmaeili, Clemens Mart, Mikko Utriainen, Riikka L. Puurunen, Wenke Weinreich
Published 2019-07-01

Enhanced pyroelectric response at morphotropic and field-induced phase transitions in ferroelectric hafnium oxide thin films

by Clemens Mart, Thomas Kämpfe, Kati Kühnel, Malte Czernohorsky, Sabine Kolodinski, Maciej Wiatr, Wenke Weinreich, Lukas M. Eng
Published 2021-05-01