Electrical characteristics of top-down ZnO nanowire transistors using remote plasma ALD

by Mohamed Sultan, Suhana, Sun, Kai, Clark, Owain, Ben Masaud, Taha, Fang, Q., Gunn, R., Partridge, J., Allen, M. W., Ashburn, Peter, Chong, Harold
Published 2012

Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications

by Mohamed Sultan, Suhana, Clark, Owain D., Ben Masaud, Taha, Fang, Qi, Gunn, Robert, Hakim, M. M. A., Sun, Kai, Ashburn, Peter, Chong, Harold M H
Published 2012