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Cheng, Cheng-Wei, Ph.D. Massachusetts Institute of Technology
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Cheng, Cheng-Wei, Ph.D. Massachusetts Institute of Technology
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In-situ deposition of high-k dielectrics on III-V compound semiconductor in MOCVD system
by
Cheng
,
Cheng
-
Wei
,
Ph.D
.
Massachusetts
Institute
of
Technology
Published 2010
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