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Chen, Carl Gang, 1972-
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Chen, Carl Gang, 1972-
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Chen, Carl Gang, 1972-
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1
Beam alignment and image metrology for scanning beam interference lithography : fabricating gratings with nanometer phase accuracy
by
Chen
,
Carl
Gang
,
1972
-
Published 2005
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2
Microcomb fabrication for high accuracy foil x-ray telescope assembly and vector Gaussian beam modeling
by
Chen
,
Carl
Gang
,
1972
-
Published 2013
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