Texture and Stress Evolution in HfN Films Sputter-Deposited at Oblique Angles

by Grégory Abadias, Fırat Anğay, Rubenson Mareus, Cédric Mastail
Published 2019-10-01

Nanocolumnar TiN thin film growth by oblique angle sputter-deposition: Experiments vs. simulations

by Boudjemaa Bouaouina, Cédric Mastail, Aurélien Besnard, Rubenson Mareus, Florin Nita, Anny Michel, Grégory Abadias
Published 2018-12-01