Effect of Oxygen Source on the Various Properties of SnO₂ Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition

by Jong Hyeon Won, Seong Ho Han, Bo Keun Park, Taek-Mo Chung, Jeong Hwan Han
Published 2020-07-01

New Heteroleptic Cobalt Precursors for Deposition of Cobalt-Based Thin Films

by Seong Ho Han, Sheby Mary George, Ga Yeon Lee, Jeong Hwan Han, Bo Keun Park, Chang Gyoun Kim, Seung Uk Son, Myoung Soo Lah, Taek-Mo Chung
Published 2017-09-01