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Amin, K.R
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Loss mechanisms in TiN high impedance superconducting microwave circuits
by
Amin
,
K.R
,
Hentz, S.
,
Jourdan, G.
,
Ladner, C.
,
Renard, J.
,
Roch, N.
Published 2022
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Related Subjects
CMOS Compatible
CMOS integrated circuits
Device materials
Different thickness
Direct-current
High impedance
Inductance
Kinetic inductances
Loss mechanisms
Low microwave loss
Microwave circuits
Microwave devices
Microwave resonators
Microwaves
Particle beams
Superconducting quantum circuit
Timing circuits
Titanium nitride
Titanium nitride films
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