Structural Properties of Thin ZnO Films Deposited by ALD under O-Rich and Zn-Rich Growth Conditions and Their Relationship with Electrical Parameters

by Sushma Mishra, Ewa Przezdziecka, Wojciech Wozniak, Abinash Adhikari, Rafal Jakiela, Wojciech Paszkowicz, Adrian Sulich, Monika Ozga, Krzysztof Kopalko, Elzbieta Guziewicz
Published 2021-07-01