プラズマプロセスにおけるフリーラジカルに関する研究

by 後藤, 俊夫, 菅井, 秀郎, 村岡, 克紀, 橘, 邦英, 渡辺, 征夫, 真壁, 利明, 安田, 幸夫, 田頭, 博昭
Published 1997

プラズマディスプレイパネル用電極材料の二次電子放出利得改善に関する研究

by 本山, 靖
Published 2008

Radical Kinetics and Its Control in Chemical Vapor Deposition of Amorphous, Microcrystalline and Polycrystalline Silicon Thin Films

by Shirafuji, Tatsuru
Published 2008

Study on the insulated probe method for monitoring processing plasma

by Deguchi, Mikio
Published 2011

A study on reaction mechanisms in chemical vapor deposition of (Ba,Sr)TiO3 films for Gbit-scale DRAM capacitors

by Yamamuka, Mikio
Published 2011

Spectroscopic Study on Metalorganic Chemical Vapor Deposition Mechanisms of Barium Strontium Titanate Films

by Momose, Shun
Published 2011

Triggering and Guiding Electrical Discharge, and Plasma Formation by Superposition of Laser Beams - A Fundamental Study on the Controlled Inducing of Lightning -

by Jinno, Masafumi
Published 2012

半導体デバイス製造プロセスにおける絶縁膜のプラズマエッチング技術に関する研究

by 今井, 伸一
Published 2010

A study on the application of microplasmas to novel optical devices

by Lee, Daesung
Published 2010

A study on the luminous efficiency improvement of plasma display panels based on spectroscopic diagnostics of microdischarge plasmas

by Oh, Jun-Seok
Published 2011

ECRプラズマを応用した半導体加工装置の研究

by 嶋田, 勝
Published 2011

Solid Particle Formation and Strongly Coupled Phenomena in Nonequilibrium Plasmas

by Takahashi, Kazuo
Published 2011

HIDランプの封入物の発光と反応に関する研究

by 石神, 敏彦
Published 2014

プラズマエッチング技術の半導体デバイスへの応用に関する研究

by 米田, 昌弘
Published 2014