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1“..., in the past 0.6μm manufacturing process, the offset spec between layers are 0.15μm, However advances to 0.18μm...”
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2by 謝文堯“... production, it determine the advanced degree in the whole process. In the current lithography process...”
Published 2007
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3by Christopher Mountain, Marta Kluba, Lambert Bergers, Jaap Snijder, Ronald Dekker“...Accurate alignment between the cavities in cavity-SOI (c-SOI) wafers and lithography on the wafer...”
Published 2019-12-01
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4“...碩士 === 國立臺灣科技大學 === 自動化及控制研究所 === 104 === To acquire the advanced-node technology, overlay becomes...”
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5“... the length of the grating while maintaining constant effective refractive index. Recent advances on apodized...”
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6by Barwicz, Tymon“... microring-resonators. The fabrication is based on direct-write scanning-electronbeam lithography. A sidewall...”
Published 2006
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7“... power (Padj) of —29.5 dBc at 1.25 MHz offset and —44.9 dBc at 2.25 MHz offset from the center frequency...”
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8“..., advanced lithography technology and novel fabrication process. In chapter Ⅱ, we used the metamorphic In0.5...”
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9by Ghosh, Siddhartha“...Over the past several years, rapid advances in the field of integrated photonics coupled...”
Published 2015
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11by Moro Melgar, Diego“... collaboration avec le Laboratoire de Photonique et de Nanostructures (LPN) en utilisant la lithographie...”
Published 2017
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