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1“... the influence of applying deuterium (D2) post-metallization-anneal (PMA) to electro-chemical plating (ECP) Cu...”
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2“...碩士 === 國立暨南國際大學 === 電機工程學系 === 90 === Post-metallization-anneal (PMA) has long been used...”
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5by Longda Zhou, Qianqian Liu, Hong Yang, Zhigang Ji, Hao Xu, Guilei Wang, Eddy Simoen, Haojie Jiang, Ying Luo, Zhenzhen Kong, Guobin Bai, Jun Luo, Huaxiang Yin, Chao Zhao, Wenwu WangSubjects: “...post-metallization annealing...”
Published 2021-01-01
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6“... were achieved by bilayer or multi-layer metal followed by post-metal deposition annealing...”
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7“... applied post metal annealing to improve the Fermi-level pinning due to interface traps and the capacitance...”
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8“... be precisely pinned at a certain level by different post-metal-deposition annealing temperatures. The device...”
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9“... HfOx-based RRAM with post-metal annealing and engineering H2O pressure of ALD sub-HfOx dielectric films...”
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10“... by organisms. Thus, in natural conditions, plants may be subjected to post-metal-stress conditions. The review...”
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11“.... The effects of post-metal treatment and geometric parameters on NWTFT were then discussed. The advantages...”
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12“... dielectric layer. To confer the impact of metal nitride TaN in 50nm, 100nm or 150nm on HfO2 with post-metal...”
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13“...-Beam defect detection technology on the post metal CMP cap with SiCN has been studied. Some fabs do e...”
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14“... length, channel width, post-metal treatment, and temperature, etc. From the results, we propose a...”
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15“... and thickness of the Gadolinium oxide resistive switching material and Post Metal Annealing (PMA) process to get...”
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16by Ritenour, Andrew P. (Andrew Paul), 1974-“... deposition (ALD) were investigated in detail. The impact of AIN interlayer thickness and post-metal anneal...”
Published 2008
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17“.... The content written cross the reported case Jia-Jia (a pseudonym), after her graduation, and post-metal-trauma...”
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18“... are effectively improved. This novel NH3 and PDA treatment provides an alternative for post metal-oxide deposition...”
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19“...In this study, we reveal that the thermal budget of post-metal annealing not only determines...”
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20“... thickness of 10 nm and HfO2 thickness of 10 nm. By applying post metal annealing at 500⁰C for 4 minutes...”
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