SU-8 based microdevices to study self-induced chemotaxis in 3D microenvironments

by Jose Maria Ayuso, Jose Maria Ayuso, Jose Maria Ayuso, Rosa eMonge, Rosa eMonge, Rosa eMonge, Guillermo eLlamazares, Guillermo eLlamazares, Guillermo eLlamazares, Marco eMoreno, Marco eMoreno, Marco eMoreno, Maria eAgirregabiria, Javier eBerganzo, Manuel eDoblaré, Manuel eDoblaré, Manuel eDoblaré, Iñaki eOchoa, Iñaki eOchoa, Iñaki eOchoa, Luis J. Fernandez, Luis J. Fernandez, Luis J. Fernandez
Published 2015-05-01

Spatially Resolved Cross-Linking Characterization by Imaging Low-Coherence Interferometry

by Christopher Taudt, Bryan Nelsen, Elisabeth Rossegger, Sandra Schlögl, Edmund Koch, Peter Hartmann
Published 2019-03-01

(1) Ionic outgassing from underlayer materials and photoresist upon irradiation at 13.5 nm (2...

by Yu-Hsien Shih, 施郁嫻
Published 2009

Analysis of Viscous Drag Reduction and Thermal Transport Effects for Microengineered Ultrahydrophobic Surfaces

by Davies, Jason W.
Published 2006

UV-LIGA: From Development to Commercialization

by Grégoire Genolet, Hubert Lorenz
Published 2014-07-01

Six-Membered Aromatic Polyazides: Synthesis and Application

by Sergei V. Chapyshev
Published 2015-10-01

(1) Qualitative and quantitative outgassing from photoresist films upon DUV, VUV, EUV and BEUV...

by Hung-Miao Lin, 林虹妙
Published 2014

Role of Strongly Interacting Additives in Tuning the Structure and Properties of Polymer Systems

by Daga, Vikram Kumar
Published 2011

Toward sub-10 nm lithographic processes: epoxy-based negative tone molecular resists and directed self-assembly (DSA) of high χ block copolymers

by Cheng, Jing
Published 2013

Synthèse d'électrodes carbonées pour la détection électrochimique et insertion dans un système microfluidique

by Pézard, Julien
Published 2015

Photopatternable Epoxy-Based Thermosets

by Michael Giebler, Simone Radl, Thomas Ules, Thomas Griesser, Sandra Schlögl
Published 2019-07-01

Theory, Design, and Fabrication of Diffractive Grating Coupler for Slab Waveguide

by Harper, Kevin Randolph
Published 2003

Dielectric Nanocomposites for High Performance Embedded Capacitors in Organic Printed Circuit Boards

by Xu, Jianwen
Published 2006

Optical Spectroscopy of Nanostructured Materials

by Hartschuh, Ryan D.
Published 2007

Development and advanced characterization of novel chemically amplified resists for next generation lithography

by Lee, Cheng-Tsung
Published 2010

The Variables and Invariants in the Evolution of Logic Optical Lithography Process

by Qiang Wu
Published 2019-02-01

Development and characterization of plasma etching processes for the dimensional control and LWR issues during High-k Metal gate stack patterning for 14FDSOI technologies

by Ros Bengoetxea, Onintza
Published 2016

Etude de la dégradation de la protection par des résines photosensibles de la grille métallique TiN lors de gravures humides pour la réalisation de transistors de technologies sub-...

by Foucaud, Mathieu
Published 2015