Bolometers 1 Dipole antennas 1 Electron beam lithography 1 Electron-beam lithography 1 Folded dipoles 1 Half-wave dipole 1 Heater 1 High impedance 1 Micro-bolometers 1 Noise equivalent power 1 Optical data processing 1 Responsivity 1 Tera Hertz 1 Thermal detectors 1 antenna 1 electron beam lithography 1 folded dipole 1 halfwave dipole heater 1 noise equivalent power 1 responsivity 1 terahertz 1 thermal detector 1 thermistor 1