Absorptance 1 Gallium arsenide 1 Hole-array structures 1 III-V semiconductors 1 MEMS 1 MEMS resonator 1 Microelectromechanical devices 1 Microelectromechanical systems resonators 1 Nanomesh 1 Nanostructures 1 Optical properties 1 Porous nanostructures 1 Specific heat 1 Tera Hertz 1 Terahertz absorptance 1 Terahertz sensing Terahertz waves 1 Thermal conductance 1 Thermal conductivity 1 Thermal sensors 1 bolometer 1 porous nanostructure 1 terahertz absorptance 1 terahertz sensing 1 thermal conductance 1