Silicon substrates Substrates 8 Silicon 6 Scanning electron microscopy 4 Catalysts 3 Semiconductor alloys 3 Si-Ge alloys 3 Thin films 3 Chemical vapor deposition 2 Field emission microscopes 2 Field emission scanning electron microscopy 2 Germanium 2 III-V semiconductors 2 Infrared devices 2 Lattice mismatch 2 Magnetism 2 Morphology 2 Nanorods 2 Phases transformation 2 Physical vapor deposition 2 Raman spectroscopy 2 Semiconductor materials 2 Silicon wafers 2 Tin alloys 2 X ray diffraction 2 1550 nm 1 2-Methoxyethanol 1 Ammonium hydroxide 1 Annealing temperatures 1 Annealing time 1