Suggested Topics within your search.
Suggested Topics within your search.
Aluminum nitride
1
Ambient gas
1
Annealing
1
Atmospheric temperature
1
Etching
1
High-temperature annealing
1
Highest temperature
1
Kinetics
1
N incorporation
1
N2 annealing
1
Nitridation
1
Nitridation Process
1
Nitridation kinetic
1
Nitridation kinetics
1
SiC surface nitridation
Silica
1
Silicon
1
Silicon carbide
1
Structure-based
1
Surface nitridation
1
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1