Atomically flat interfaces 1 Elastic behavior 1 Elastic relaxation 1 Elastic-strains 1 Etching 1 Lattice constants 1 Lattice mismatch 1 Linear elasticity theory 1 Molecular beam epitaxy 1 Nano-structuring 1 Nanowires 1 Si/Ge superlattices Si/SiGe 1 Structural parameter 1 Substrates 1 Superlattice nanowires 1 Thermoelectric equipment 1