Sacrificial layer Air cavity 1 Channel length 1 Energy transfer 1 Focused ultrasound 1 Focusing 1 Focusing performance 1 Fresnel 1 High quality 1 High-κ 1 Layered semiconductors 1 Microanalysis 1 Microchannels 1 Microfabrication 1 Microfabrication process 1 Molybdenum compounds 1 P-type 1 Parylenes 1 Performance 1 Perovskite 1 Perovskite oxides 1 Polydimethylsiloxane 1 Selenium compounds 1 Sensors and actuators 1 Silicones 1 Simple++ 1 Single crystals 1 Strontium titanates 1 Sulfur compounds 1 Thin-films 1