Resonators Quantum optics 5 Silicon photonics 5 Phase noise 4 Waveguides 4 Acoustic surface wave devices 3 Acoustic waves 3 CMOS integrated circuits 3 Low-power consumption 3 MEMS 3 Optical properties 3 Oscillators (electronic) 3 Photonic devices 3 Q factor measurement 3 Refractive index 3 SAW resonators 3 Silicon compounds 3 Silicon nitride 3 silicon photonics 3 Array waveguide 2 Cascode amplifiers 2 Circuit simulation 2 Cost effectiveness 2 Design 2 Dual Band 2 Evanescent fields 2 High-fidelity 2 Infrared devices 2 Infrared sensing 2 Integrated circuit design 2