Suggested Topics within your search.
Suggested Topics within your search.
Activation energy
1
Desorption
1
End-of-range defects
1
Epitaxial silicon
Heat treatment
1
High resolution transmission electron microscopy
1
In-situ transmission electron microscopies
1
Ion implantation
1
Ion implanted
1
Ions implantation
1
Molecular ion implantation
1
Shrinkage
1
Shrinkage behavior
1
Shrinkage kinetics
1
Shrinkage rates
1
Silicon wafers
1
Thermodynamic stability
1
Transmission electron microscopy observation
1
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